They do involve some kind of chemical reactions. For example, in ArF laser, Ar reacts with F2 to form ArF. But ArF is only metastable, which makes it not the same as typical chemical reactions.
@@ferrothinfilmslab3411 but why its detail is rare on web , text books etc ? Why there's any experimental demonstration on RU-vid ? Is it extremely difficult to make ?
There are at least two reasons. 1) The laser gas (F2, ArF, KrF) are all very toxic (fatal if inhaled). 2) The lasing requires high voltage (30 kV). Therefore, excimer laser needs to be handled with extra safety measure, which of course makes it expensive.
