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Double Patterning to the rescue (LELE, LFLE, SADP) - Part 1 

nanolearning
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Introduction to Double Patterning which is used extensively for printing transistors and other features in front end of line (FEOL) flow in a semiconductor chip.
This video also introduces the various processing options to achieve double patterning i.e.
1. Litho Etch Litho Etch (LELE)
2. Litho Freeze Litho Etch (LFLE)
3. Self Aligned Double Patterning (SADP)

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6 окт 2024

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Комментарии : 18   
@ashwanisirohi
@ashwanisirohi 6 лет назад
Wonderful.....you have skill to explain the technical things wonderfully, precisely and with ease.
@hansrx7
@hansrx7 12 лет назад
Thanks for the clear and lucid explaination
@joonkim6610
@joonkim6610 6 лет назад
Thanks for your clear explanation.
@traceynewton8699
@traceynewton8699 10 лет назад
I really enjoy your videos. Thank you!
@gamitheshkumar3725
@gamitheshkumar3725 4 года назад
Very good explanation.. 👌👌
@azizbedoui5606
@azizbedoui5606 2 года назад
thank you bro
@sagarkore9648
@sagarkore9648 7 лет назад
Nice Explanation
@유명한-c7h
@유명한-c7h 6 лет назад
Nice explanation
@我想想-e5d
@我想想-e5d 3 года назад
Wait! why there is no wash process in LEFE? especially with two hard mask material remain, there may need more than one process two wash away those materials. Actually 5~6 steps in the process.
@Kie-7077
@Kie-7077 6 лет назад
2018 says hello, it's quad-patterning now and we still can't get euv to work well enough.
@nephewniece3312
@nephewniece3312 5 лет назад
CN u send ur email
@yerravellyvenu1071
@yerravellyvenu1071 3 года назад
HI, In Litho Freeze Litho Etch (LFLE),without etching, how you will get step 3
@nephewniece3312
@nephewniece3312 3 года назад
Hi, what are the drawbacks when come to physical design not relate to manufacturing?
@umarao2711
@umarao2711 6 лет назад
Can you explain how we will pattern (yellow lines) in step1 of LELE process
@AnotherMlbbPlayer
@AnotherMlbbPlayer 4 года назад
Wjy they are using silicon dixode
@bloomi2542
@bloomi2542 2 года назад
Scott Thompson uwu daddy
@neilmcmahon
@neilmcmahon 6 лет назад
Very difficult to listen to this guy will all his uhhs and ahhss
@GAURAVYADAV-yv3lh
@GAURAVYADAV-yv3lh 8 лет назад
Nice Explanation
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