The Shared Materials Instrumentation Facility (SMIF) is the Pratt School of Engineering’s core facility that enables materials, devices, and integrated systems research at Duke University in a variety of fields that include nanotechnology, biomaterials and biomedical engineering, information sciences, optoelectronics, sensor technology, and renewable energy. SMIF is housed in the Fitzpatrick Center for Interdisciplinary Engineering, Medicine and Applied Sciences (FCIEMAS). The facility consists of 7,000 square feet of clean room fabrication space, and nearly 3,000 square feet of specialized laboratory space for characterization and imaging equipment. SMIF is part of the Research Triangle Nanotechnology Network (RTNN) in partnership with similar facilities at NC State University and the UNC Chapel Hill. The RTNN is one of 16 organizations nationwide that comprise the National Science Foundation sponsored National Nanotechnology Coordinated Infrastructure (NNCI) program.
You said: "In development, only the parts of the resist that have been exposed by EBL, will be removed. But this is only true if the resist is a positive resist. If you use a negative resist, all the exposed parts are going to be hardened , and after the development, only the unexposed areas get removed.
The resist can be positive or negative. Depending on whether it's a positive or negative resist, the exposed resist can be removed or retained respectively, after the development.
This was an INCREDIBLE video!!! I have been helping a semiconductor fab do the CAD drawings for the new tool install so i spend a lot of time around all of these machines. I had no idea how they or what the process was but this totally explained it! Thank you!
Depends on the pressure of the system, but it ranges in the many hundreds to roughly a thousand volts. Also the plasma initiation voltage is higher than the voltage required to sustain the plasma in most cases, so a striking voltage is used similar to how tig welders have a high frequency start.
