ALIO Nano Precision 6-Axis Metrology System - Air Bearing Stage and Hybrid Hexapod 

ALIO's patent pending Hybrid Hexapod® customized for large volume 6 axis Nano Metrology® System with G-Code motion programming. Hybrid Hexapod® with an air bearing X axis performs 6-D Nano Precision® over a large envelope for metrology applications. ALIO is proud to be the reference system for the world's major high end metrology companies.